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and large elastic modulus, making it possible to implement electrostatic MEMS actuation schemes with ultrathin beams. Moreover, the high resistance of TiN against biocorrosion qualifies the material for applications in biogenic environments. The figure shows an electron-microscopic picture of a MEMS biosensor with a 50 nm thin bendable TiN beam above a TiN ground plate. Both can be driven as opposite electrodes of a capacitor, since the beam is fixed in electrically

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