isolating side walls. When a fluid is suspended in the cavity its viscosity may be derived from bending the beam by electrical attraction to the ground plate and measuring the bending velocity.

Basic processes

Deposition processes

One of the basic building blocks in MEMS processing is the ability to deposit thin films of material with a thickness anywhere from one micrometre to about 100 micrometres. The NEMS process is the same, although the measurement of film deposition ranges from a few nanometres to one micrometre.

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