Imaging Spectroscopic Ellipsometry (ISE) combines the features of IE with the advantages of spectroscopic optical characterization. ISE is typically employed in the spectral range between 190 nm and 1700 nm, due to technological restrictions of imaging components and sensors. It has become a powerful tool in many disciplines of modern science and technology, particularly in 2D material research, MEMS applications, and display inspection.

In situ ellipsometry

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