industries use the term "ultrapure water", the exact definitions differ among industries. Standards for ultrapure water are defined by various groups for the power industry, semiconductor industry, and pharmaceutical industry. Water purity requirements of the semiconductor industry are generally the most stringent to prevent circuit faults at the nanometer scale.

Ultrapure water standards

A number of organizations and groups develop and publish standards associated with the production of UPW. For microelectronics

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