the reflected intensity will deviate from that predicted by the law of Fresnel reflectivity. The deviations can then be analyzed to obtain the density profile of the interface normal to the surface.

History

The earliest measurements of X-ray reflectometry were published by Heinz Kiessig in 1931, focusing mainly on the total reflection region of thin nickel films on glass. First calculations of XRR curves were performed by Lyman G. Parratt in

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