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down microelectronic devices according to Moore's law. ALD is an active field of research, with hundreds of different processes published in the scientific literature, though some of them exhibit behaviors that depart from that of an ideal ALD process. Currently there are several comprehensive review papers that give a summary of the published ALD processes, including the work of Puurunen, Miikkulainen et al., Knoops et al., and Mackus & Schneider et al.. An

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