energies below 100 eV, IMFP can be evaluated in high-energy secondary electron yield (SEY) experiments. Therefore, the SEY for an arbitrary incident energy between 0.1 keV-10 keV is analyzed. According to these experiments, a Monte Carlo model can be used to simulate the SEYs and determine the IMFP below 100 eV.

Predictive formulas

Using the dielectric formalism, the IMFP can be calculated by solving the following integral:}^{\omega_{\mathrm{max}}} \, d\omega \int_{k_-}^{k_+} \mathrm{Im}\left(\frac{-1}{\epsilon(k,\omega)}\right)

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