A capacitive MEMS switch is developed using a moving plate or sensing element, which changes the capacitance. Ohmic switches are controlled by electrostatically controlled cantilevers. Ohmic MEMS switches can fail from metal fatigue of the MEMS actuator (cantilever) and contact wear, since cantilevers can deform over time.

Materials

The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e.

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