field at the time), as well as the Dutch company ASML and Silicon Valley Group (SVG) all sought licensing. In 2001, SVG was acquired by ASML, helping ASML become the leading benefactor of the critical technology.

By 2018, ASML succeeded in deploying the intellectual property from the EUV-LLC after several decades of developmental research, with incorporation of European-funded EUCLIDES (Extreme UV Concept Lithography Development System) and long-standing partner