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<a accesskey="3" href="page.php?w=Ion_implantation&amp;p=2">3.Next</a>
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<p><a href="page.php?w=Image%3AIon_implantation_machine_at_LAAS_0521.jpg">thumb</a><b>Ion implantation</b> is a low-temperature process by which <a href="page.php?w=ion_%28physics%29">ion</a>s of one element are accelerated into a solid target, thereby changing the target's physical, chemical, or electrical properties. Ion implantation is used in <a href="page.php?w=Fabrication_%28semiconductor%29">semiconductor device fabrication</a> and in metal finishing, as well as in <a href="page.php?w=materials_science">materials science</a> research. The</p><p>
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